JPH079380Y2 - 半導体ウェハー検査装置 - Google Patents
半導体ウェハー検査装置Info
- Publication number
- JPH079380Y2 JPH079380Y2 JP12223389U JP12223389U JPH079380Y2 JP H079380 Y2 JPH079380 Y2 JP H079380Y2 JP 12223389 U JP12223389 U JP 12223389U JP 12223389 U JP12223389 U JP 12223389U JP H079380 Y2 JPH079380 Y2 JP H079380Y2
- Authority
- JP
- Japan
- Prior art keywords
- performance board
- test head
- semiconductor wafer
- prober
- wafer inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 22
- 238000007689 inspection Methods 0.000 title claims description 16
- 238000012360 testing method Methods 0.000 claims description 29
- 239000000523 sample Substances 0.000 claims description 27
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 241000238876 Acari Species 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 244000144985 peep Species 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12223389U JPH079380Y2 (ja) | 1989-10-20 | 1989-10-20 | 半導体ウェハー検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12223389U JPH079380Y2 (ja) | 1989-10-20 | 1989-10-20 | 半導体ウェハー検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0361339U JPH0361339U (en]) | 1991-06-17 |
| JPH079380Y2 true JPH079380Y2 (ja) | 1995-03-06 |
Family
ID=31670243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12223389U Expired - Lifetime JPH079380Y2 (ja) | 1989-10-20 | 1989-10-20 | 半導体ウェハー検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079380Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007322372A (ja) * | 2006-06-05 | 2007-12-13 | Yokogawa Electric Corp | Ｉｃテスタ |
| JP5277827B2 (ja) * | 2008-09-22 | 2013-08-28 | 東京エレクトロン株式会社 | プローブ装置 |
| JP4746153B1 (ja) * | 2010-12-27 | 2011-08-10 | 忠 岩田 | 揺動式介護ベッド装置 |
-
1989
- 1989-10-20 JP JP12223389U patent/JPH079380Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0361339U (en]) | 1991-06-17 |
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